The Pull-Off Force and the Work of Adhesion: New Challenges at the Nanoscale
Adhesion at the nanoscale and between MEMS/NEMS components can be unique both physically and in the manner in which it is measured [1]. Unpredictable topographies, size-dependent deformation mechanisms, compliance of surface coatings, and the statistical nature of device/surface fabrication are just...
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Published in | Adhesion Aspects in MEMS/NEMS pp. 209 - 222 |
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Format | Book Chapter |
Language | English |
Published |
CRC Press
2010
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Subjects | |
Online Access | Get full text |
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Summary: | Adhesion at the nanoscale and between MEMS/NEMS components can be unique
both physically and in the manner in which it is measured [1]. Unpredictable
topographies, size-dependent deformation mechanisms, compliance of surface
coatings, and the statistical nature of device/surface fabrication are just a few complexities that lead to a rich diversity of adhesion behavior at the nanoscale [1-8].
An equal challenge is that nanoscale adhesion is often most conveniently measured with scanning probe microscopies, which can measure very small forces, but
provide only limited information about the contact geometry [9, 10], thus making
difficult the validation of suitable contact mechanics models. |
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DOI: | 10.1201/b12181-16 |