Influence of CH4 Flow Rate on Microstructure and Properties of Ti-C:H Films Deposited by DC Reactive Magnetron Sputtering

• Published in: Tribology transactions Vol. 60; no. 5; pp. 852 - 860
• Main Authors: Zhou, Shengguo, Liu, Long, Ma, Liqiu, Wang, Yuechen, Liu, Zhengbing
• Format: Journal Article
• Language: English
• Published: Taylor & Francis 03.09.2017
• Subjects: magnetron sputtering; microstructure; Ti-C:H; tribological properties

Nanocomposite Ti-containing hydrogenated carbon films (Ti-C:H) were prepared using a DC reactive magnetron sputtering system. The relationship between CH 4 flow rate and the film characterization and tribological behaviors in both ambient air and deionized water conditions were investigated. Results...