Comparison of f-Q scaling in wineglass and radial modes in ring resonators

Low phase noise MEMS oscillators necessitate resonators with high f-Q. Resonators achieving high f-Q (mechanical frequency-quality factor product) close to the thermo-elastic damping (TED) limit have been demonstrated at expense of feed-through. Here we present a study comparing frequency scaling of...

Full description

Saved in:
Bibliographic Details
Published in2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 777 - 780
Main Authors Tallur, S., Bhave, S. A.
Format Conference Proceeding Journal Article
LanguageEnglish
Published IEEE 01.01.2013
Subjects
Conferences
Damping
Harmonic analysis
Higher harmonics
Mechanical systems
Optical amplifiers
Optical device fabrication
Optical ring resonators
Optical sensors
Oscillators
Quality factor
Resonators
Saturation
Temperature measurement
Online AccessGet full text

Cover

More Information
Summary:Low phase noise MEMS oscillators necessitate resonators with high f-Q. Resonators achieving high f-Q (mechanical frequency-quality factor product) close to the thermo-elastic damping (TED) limit have been demonstrated at expense of feed-through. Here we present a study comparing frequency scaling of quality factors of wineglass and radial modes in a ring resonator using an opto-mechanical two port transmission measurement. Higher harmonics of the wineglass mode show an increasing trend in the f-Q product, as compared to a saturation of f-Q for radial modes. The measured f-Q of 5.11×10 13 Hz at 9.82GHz in air at room temperature for a wineglass mode is close to the highest measured values in silicon resonators.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Conference-1
ObjectType-Feature-3
content type line 23
SourceType-Conference Papers & Proceedings-2
ISBN:9781467356541
1467356549
ISSN:1084-6999
DOI:10.1109/MEMSYS.2013.6474358