Characterization of a 3D-MEMS piezoelectric transducer for portable imaging systems

This paper presents the characterization of two ultrasound transducers that were developed for two different applications. Both transducer arrays are based on a high performance PZNT film integrated in a 3D dome shaped structure, which forms the basic resonator cell of the transducer. The first tran...

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Bibliographic Details
Published in2015 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 4
Main Authors Nistorica, C., Latev, D., Gardner, D., Imai, D., Daft, C.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2015
Subjects
Bandwidth
Dome
HIFU
Image resolution
MEMS
PMUT
PZNT
Sensitivity
Three-dimensional displays
Transducers
Ultrasonic imaging
Wires
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Summary:This paper presents the characterization of two ultrasound transducers that were developed for two different applications. Both transducer arrays are based on a high performance PZNT film integrated in a 3D dome shaped structure, which forms the basic resonator cell of the transducer. The first transducer having wide bandwidth and low operating voltage of 20V can be implemented in a portable type of ultrasound system. The second transducer having high sensitivity, low operating voltage and a very small form factor can be implemented in miniaturized ultrasound catheters. Inter-element cross talk of less than -35dB was measured. Images of a wire target phantom were acquired using a phased array algorithm demonstrating high resolution axially and laterally.
DOI:10.1109/ULTSYM.2015.0373