Selective chemical sensor for liquid specimens based on lithium tantalate surface acoustic wave devices
We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device selective chemical sensor micro-fabricated on 36° rotated Y-cut X-propagating LiTaO3. A custom designed test fixture was manufactured for RF measurements. The proof of the sensor concept was based on dete...
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Published in | 2015 International Semiconductor Conference (CAS) pp. 271 - 274 |
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Main Authors | , , , , , , , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
IEEE
01.10.2015
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Subjects | |
Online Access | Get full text |
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Summary: | We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device selective chemical sensor micro-fabricated on 36° rotated Y-cut X-propagating LiTaO3. A custom designed test fixture was manufactured for RF measurements. The proof of the sensor concept was based on detection of high molecular weight targets in liquid samples. Thus, the antigen-antibody label-free interaction was studied by monitoring the variation of the angle phase of SAW sensor with the concentration of some target biological analyte. |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Conference-1 ObjectType-Feature-3 content type line 23 SourceType-Conference Papers & Proceedings-2 |
ISBN: | 9781479988624 1479988626 |
ISSN: | 1545-827X 2377-0678 |
DOI: | 10.1109/SMICND.2015.7355229 |