Selective chemical sensor for liquid specimens based on lithium tantalate surface acoustic wave devices

We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device selective chemical sensor micro-fabricated on 36° rotated Y-cut X-propagating LiTaO3. A custom designed test fixture was manufactured for RF measurements. The proof of the sensor concept was based on dete...

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Published in2015 International Semiconductor Conference (CAS) pp. 271 - 274
Main Authors Baracu, Angela, Gurban, Ana-Maria, Giangu, Ioana, Craciunoiu, Florea, Buiculescu, Valentin, Dinescu, Adrian, Muller, Raluca, Rotariu, Lucian, Bala, Camelia, Mitrea, Cristina
Format Conference Proceeding Journal Article
LanguageEnglish
Published IEEE 01.10.2015
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Summary:We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device selective chemical sensor micro-fabricated on 36° rotated Y-cut X-propagating LiTaO3. A custom designed test fixture was manufactured for RF measurements. The proof of the sensor concept was based on detection of high molecular weight targets in liquid samples. Thus, the antigen-antibody label-free interaction was studied by monitoring the variation of the angle phase of SAW sensor with the concentration of some target biological analyte.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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SourceType-Conference Papers & Proceedings-2
ISBN:9781479988624
1479988626
ISSN:1545-827X
2377-0678
DOI:10.1109/SMICND.2015.7355229