Advanced system for CMOS SOI test structures measurements

The article considers modernized CMOS SOI test structure measurement system that allows one to control characteristics of both separate transistors and VLSI blocks during experiment. Changes made in hardware and software parts of the measurement setup are discussed and reasoned.

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Bibliographic Details
Published in2016 International Siberian Conference on Control and Communications (SIBCON) pp. 1 - 4
Main Authors Shvetsov-Shilovskiy, I. I., Nekrasov, P. V., Ulanova, A. V., Nikiforov, A. Yu
Format Conference Proceeding Journal Article
LanguageEnglish
Published IEEE 01.05.2016
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Summary:The article considers modernized CMOS SOI test structure measurement system that allows one to control characteristics of both separate transistors and VLSI blocks during experiment. Changes made in hardware and software parts of the measurement setup are discussed and reasoned.
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SourceType-Conference Papers & Proceedings-2
ISSN:2380-6516
DOI:10.1109/SIBCON.2016.7491817