Complex peripheral Lamb modes in FBARs

In this paper we give experimental observations of the complex valued Lamb mode in a FBAR resonator, using the AIM [1] and standard S-parameter measurements. Furthermore, a theoretical explanation of the observed behavior, based on the Berlincourt formula for the effective coupling coefficient, is o...

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Bibliographic Details
Published in2013 IEEE International Ultrasonics Symposium (IUS) pp. 757 - 760
Main Authors Kaitila, Jyrki, Larson, John D.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2013
Subjects
acoustic imaging microscope
Berlincourt formula
complex mode
Couplings
Dispersion
Electrodes
Film bulk acoustic resonators
Frequency measurement
plate wave dispersion
Resonant frequency
Tungsten
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Summary:In this paper we give experimental observations of the complex valued Lamb mode in a FBAR resonator, using the AIM [1] and standard S-parameter measurements. Furthermore, a theoretical explanation of the observed behavior, based on the Berlincourt formula for the effective coupling coefficient, is offered. This explanation proposes a laterally "self-confined" mode that arises through the mechanical boundary conditions present at the periphery of the resonator structure.
ISSN:1051-0117
DOI:10.1109/ULTSYM.2013.0195