Calibration and optimization of interconnect based MEMS test structures for predicting thermo-mechanical stress in metallization

• Published in: 2004 IEEE International Reliability Physics Symposium. Proceedings pp. 255 - 258
• Main Authors: dos Santos, J.M.M., Horsfall, A.B., Pina, J.C.P., Wright, N.G., O'Neill, A.G., Wang, K., Soare, S.M., Bull, S.J., Terry, J.G., Walton, A.J., Gundlach, A.M., Stevenson, J.T.M.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Aluminum; Applied sciences; Calibration; Compressive stress; Design. Technologies. Operation analysis. Testing; Electronics; Exact sciences and technology; Integrated circuits; Metallization; Micro- and nanoelectromechanical devices (mems/nems); Microelectronic fabrication (materials and surfaces technology); Micromechanical devices; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Silicon; Temperature sensors; Testing; Testing, measurement, noise and reliability; Thermal stresses; Thermomechanical processes; High resolution; Creep; Measurement sensor; Metallizing; X ray diffraction; Mismatching; Optimization; Compressive stress; Microelectronic fabrication; Mechanical stress; Interconnection; Sintering; Integrated circuit; Testing equipment; Microelectromechanical device; Comparative study
• ISBN: 9780780383159; 078038315X
• DOI: 10.1109/RELPHY.2004.1315333

We have shown that the in-plane stress in aluminium metallisation can be observed using a rotating beam sensor structure. This shows that the extrinsic stress from the mismatch in expansion coefficient between the aluminium and the silicon substrate dominates over the compressive stress from the sputter growth. Sintering the layers at temperatures above 150/spl deg/C reduces this compressive stress due to the action of creep. Calibration of the rotation of the device has been undertaken by direct comparison to high resolution x-ray diffraction measurements and these show that the sensor has a resolution better than 2.8MPa.