A 0.1 GHz to 1.1 THz Inverted Grounded-CPW mTRL Calibration Kit Characterization in an InP HBT Process

• Published in: 2024 IEEE Wireless and Microwave Technology Conference (WAMICON) pp. 1 - 4
• Main Authors: Cheron, Jerome, Jones, Rob D., Williams, Dylan F., Urteaga, Miguel E., Bosworth, Bryan T., Jungwirth, Nicholas R., Jargon, Jeffrey A., Jamroz, Benjamin F., Long, Christian J., Orloff, Nathan D., Feldman, Ari D., Aaen, Peter H.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 15.04.2024
• Subjects: Calibration; grounded-coplanar waveguide line (G-CPW); Heterojunction bipolar transistors; multiline thru-reflect-line (mTRL); on-wafer calibration; Power transmission lines; S-parameters; Scattering parameters; Semiconductor device measurement; terahertz (THz) frequencies; Transmission line measurements; Wireless communication

We report a novel design approach of on-wafer multiline thru-reflect-line (mTRL) calibration kit fabricated on a commercial semiconductor-based transistor process that we validate from 0.1 GHz to 1.1 THz. The on-wafer calibration standards are designed with an innovative inverted grounded-coplanar w...