Simulation of Temperature Driven Microflows Using a Lattice Boltzmann Method in Slip and Moderate Transition Regimes

• Published in: 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) pp. 1 - 6
• Main Authors: Selmi, Anas, Bhapkar, Sahil, Nagel, Cristian, Kummerlander, Adrian, Krause, Mathias J.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 17.04.2023
• Subjects: Boundary conditions; Computational modeling; Fluids; Mathematical models; Micromechanical devices; Monte Carlo methods; Temperature distribution
• ISSN: 2833-8596
• DOI: 10.1109/EuroSimE56861.2023.10100812

Micro-electromechanical systems (MEMS) are very small devices that usually contain gas under low pressure. The motion of the fluid inside such structures is affected by rarefaction effects, which are not visible in macroscale flows. To accurately predict the behavior of the fluid in such microstructures, the Lattice Boltzmann Method needs to be modified to account for these new effects. This can be done by introducing relative fluid-wall velocity in the form of slip boundary conditions. Furthermore, temperature effects like temperature jump and thermal creep can be included using wall boundary conditions. In this paper, different models for the slip are explored and evaluated over the Knudsen number. Then, a thermal flow is simulated and benchmarked by Direct Simulation Monte-Carlo (DSMC). The results show that these extensions offer a good approximation in the slip and moderate transition regimes (Knudsen number (Kn) < 1).