Pseudo-breakdown events induced by biased-thermal-stressing of intra-level Cu interconnects-reliability and performance impact

• Published in: 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320) pp. 305 - 311
• Main Authors: Song, W.S., Kim, T.J., Lee, D.H., Kim, T.K., Lee, C.S., Kim, J.W., Kim, S.Y., Jeong, D.K., Park, K.C., Wee, Y.J., Suh, B.S., Choi, S.M., Kang, H.-K., Suh, K.P., Kim, S.U.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2002
• Subjects: Analytical models; Applied sciences; Circuit optimization; Circuit simulation; Delay; Design. Technologies. Operation analysis. Testing; Electric breakdown; Electronic equipment and fabrication. Passive components, printed wiring boards, connectics; Electronics; Exact sciences and technology; Failure analysis; Integrated circuit interconnections; Integrated circuits; Leakage current; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Stress; Testing; Testing, measurement, noise and reliability; Thermal stress; Performance evaluation; Circuit simulation; RC circuit; Electric stress; Metallizing; Irreversible process; Experimental study; Delay circuit; Experimental result; Electric field; Interconnection; Physical model; Failure analysis; Leakage current; Copper; Reliability; Joule effect
• ISBN: 0780373529; 9780780373525
• DOI: 10.1109/RELPHY.2002.996653

The pseudo-breakdown (PBD) phenomenon has been investigated in intra-level reliability assessment of Cu-interconnects. Field and intralevel spacing dependence show that PBDs form an irreversible permanent damage path that differs from that of HBDs by the amount of Joule heat released via breakdown induced leakage path. An RC delay simulation demonstrates that PBD leakage may hinder the circuit performance with further device scale down. Physical failure analysis reveals the lower liner/IMD interface as the predominant leakage path accompanying PBDs, confirming the failure mechanism established through the local electric and stress field simulations. We propose a PBD induced leakage mechanism supported by experimental results.