Freestanding Micro-Calorimeter for Bio-Thermal Detection with Single Thermocouple Structure

The suspension bridge structure for bio-thermal detection based on single thermocouple structure is proposed for the design of silicon-based micro-calorimeter. Due to the use of silicon-based electrodes and the suspended bridge structure by Micro-machining technology, the fabricated micro-calorimete...

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Bibliographic Details
Published in2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 72 - 75
Main Authors Liao, Jingru, Peng, Zhen, Xia, Yuanlin, Xia, Cao, Huang, Yubo, Liu, Dan, Wang, Zhuqing
Format Conference Proceeding
LanguageEnglish
Published IEEE 21.01.2024
Subjects
Biosensor
Biosensors
Bridge circuits
Enzymes
Heating systems
Micro-calorimeter
Microfluidic
Periodic structures
Sensitivity
Single thermocouple
Suspension bridge structure
Thermocouples
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Summary:The suspension bridge structure for bio-thermal detection based on single thermocouple structure is proposed for the design of silicon-based micro-calorimeter. Due to the use of silicon-based electrodes and the suspended bridge structure by Micro-machining technology, the fabricated micro-calorimeter has a high bio-detection sensitivity, which allows monitoring the heat changes during enzyme reactions by massive enzymes fixed on the surface of micro-beads within the reaction chamber. With high thermal characterization accuracy, the micro-calorimeter can simultaneously achieve ultra-high accuracy of 0.38 V/W sensitivity and fast response time of under 200 ms. The micro-calorimeter shows great potential for health detection and thermal detection of biological reactions, providing potential opportunities and possibilities for countless applications of the sensor.
ISSN:2160-1968
DOI:10.1109/MEMS58180.2024.10439415