Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies

• Published in: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 721 - 724
• Main Authors: Tseng, Chin, Wei, Ting-Chou, Lin, Chia-Hao, Hu, Zih-Song, Fang, Weileun
• Format: Conference Proceeding
• Language: English
• Published: IEEE 21.01.2024
• Subjects: Bandwidth; Couplings; Linearity; MEMS microspeaker; Micromechanical devices; Piezoelectric; Resonant frequency; Reverse-trapezoid; Sealed back-chamber; Size miniaturization; Ultra-high frequencies

This study demonstrates a piezoelectric MEMS microspeaker containing the reverse-trapezoid and triangular membranes. A unique sealed back-chamber package is also presented. The design features: (1) reverse-trapezoid cantilever membranes providing better electro-acoustic efficiency, (2) additional tr...