Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies

This study demonstrates a piezoelectric MEMS microspeaker containing the reverse-trapezoid and triangular membranes. A unique sealed back-chamber package is also presented. The design features: (1) reverse-trapezoid cantilever membranes providing better electro-acoustic efficiency, (2) additional tr...

Full description

Saved in:
Bibliographic Details
Published in2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 721 - 724
Main Authors Tseng, Chin, Wei, Ting-Chou, Lin, Chia-Hao, Hu, Zih-Song, Fang, Weileun
Format Conference Proceeding
LanguageEnglish
Published IEEE 21.01.2024
Subjects
Bandwidth
Couplings
Linearity
MEMS microspeaker
Micromechanical devices
Piezoelectric
Resonant frequency
Reverse-trapezoid
Sealed back-chamber
Size miniaturization
Ultra-high frequencies
Online AccessGet full text

Cover

More Information
Summary:This study demonstrates a piezoelectric MEMS microspeaker containing the reverse-trapezoid and triangular membranes. A unique sealed back-chamber package is also presented. The design features: (1) reverse-trapezoid cantilever membranes providing better electro-acoustic efficiency, (2) additional triangular units expanding bandwidth at ultra-high frequencies (>7 kHz), (3) a unique sealed back-chamber to create additional chamber resonance, by coupling with the structure resonance could expand the bandwidth, (4) size miniaturization with total active area of only 2 mm 2 . The proposed microspeaker shows SPL (Sound-Pressure-Level) higher than 70 dB within the frequency range of 7 kHz ~ 20 kHz when actuated by 0.707 V rms +10 V DC . The proposed design could be integrated with common dynamic drivers to make up the insufficient SPL at ultrahigh frequencies.
ISSN:2160-1968
DOI:10.1109/MEMS58180.2024.10439460