A 22dBA digital optical MEMS microphone

Optical microphones represent a promising alternative to the conventional capacitive MEMS microphones, especially when aiming at ultra-low noise applications. This paper reports the design and development of a SiP (System-in-Package) digital optical microphone with 71.6dBA SNR in 5×5×2mm 3 package w...

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Bibliographic Details
Published inESSCIRC 2023- IEEE 49th European Solid State Circuits Conference (ESSCIRC) pp. 485 - 488
Main Authors Milleri, Niccolo de, Wiesbauer, Andreas, Baschirotto, Andrea
Format Conference Proceeding
LanguageEnglish
Published IEEE 11.09.2023
Subjects
Analytical models
digital microphone
high signal-to-noise ratio (SNR)
low noise
MEMS microphone
Micromechanical devices
Optical distortion
optical microphone
Optical noise
Optical sensors
Solid state circuits
System-in-package
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Summary:Optical microphones represent a promising alternative to the conventional capacitive MEMS microphones, especially when aiming at ultra-low noise applications. This paper reports the design and development of a SiP (System-in-Package) digital optical microphone with 71.6dBA SNR in 5×5×2mm 3 package with output sensitivity of -21dBFS/Pa. The system concept is introduced, the design and modeling of the main blocks are presented and the measured results are analyzed.
ISSN:2643-1319
DOI:10.1109/ESSCIRC59616.2023.10268732