A Step-by-Step Layout Transformation Approach to Differentiate How Multiple Layout Dependent Effects Modify Device and Circuit Performance

Ring oscillators (ROs) are important components of electronic circuits. Their performance, however, is susceptible to parasitic effects when device sizes scale down. We present a methodology, that uses a series of test structures which step-by-step transform an RO layout into single-device modeling...

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Bibliographic Details
Published inProceedings of the International Conference on Microelectronic Test Structures pp. 1 - 5
Main Authors Lu, Luke, Xia, Kejun, van Langevelde, Ronald, McAndrew, Colin C., Li, Wuxia
Format Conference Proceeding
LanguageEnglish
Published IEEE 15.04.2024
Subjects
design technology co-optimization
device modeling
Layout
layout dependent effects
MOSFET
Performance evaluation
Ring oscillator
Ring oscillators
Semiconductor device modeling
Silicon
Structural rings
Transforms
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Summary:Ring oscillators (ROs) are important components of electronic circuits. Their performance, however, is susceptible to parasitic effects when device sizes scale down. We present a methodology, that uses a series of test structures which step-by-step transform an RO layout into single-device modeling layouts, to differentiate and quantify the impact of individual layout dependent effects on device DC performance. A model that is tuned to fit the DC characteristics of the devices in an RO, which are subject to multiple LDEs, gives correct timing behavior.
ISSN:2158-1029
DOI:10.1109/ICMTS59902.2024.10520696