Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements

In this paper a concept of nanoionic memory based zero energy system for vibration monitoring is presented. The system operates an fulfill their measuring function, data processing and information storage without any auxiliary power and communicate only on demand for data exchange and status reporti...

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Bibliographic Details
Published in2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) pp. 1 - 5
Main Authors Shaporin, Alexey, Stockel, Chris, Melzer, Marcel, Schaller, Falk, Forke, Roman, Zimmermann, Sven, Kuhn, Harald
Format Conference Proceeding
LanguageEnglish
Published IEEE 17.04.2023
Subjects
Micromechanical devices
Sensor systems
Transducers
Vibration measurement
Vibrations
Wireless communication
Wireless sensor networks
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Summary:In this paper a concept of nanoionic memory based zero energy system for vibration monitoring is presented. The system operates an fulfill their measuring function, data processing and information storage without any auxiliary power and communicate only on demand for data exchange and status reporting via a wireless interface. The energy is gained from the physical quantity to be measured - vibration in this case. Neither battery nor maintenance for the sensor system itself is required for the whole sensor system lifetime cycle.The transducer of the sensor already provides enough energy to process and store the data in the subsequent memory. The paper is focus on an optimal design of this piezoelectric MEMS transducer. Its design, fabrication technology, characterization and application as a part of the system are shown and discussed in details.
ISSN:2833-8596
DOI:10.1109/EuroSimE56861.2023.10100827