Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

A micromirror with piezoelectric thin film aluminum nitride (AlN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm 2 . The sensor and actuator elements...

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Bibliographic Details
Published in2019 IEEE SENSORS pp. 1 - 4
Main Authors Meinel, Katja, Stoeckel, Chris, Melzer, Marcel, Zimmermann, Sven, Forke, Roman, Hiller, Karla, Otto, Thomas
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2019
Subjects
AlN
aluminum nitride
angle sensor
micromirror
microscanner
piezoelectric
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Summary:A micromirror with piezoelectric thin film aluminum nitride (AlN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm 2 . The sensor and actuator elements are monolithically fabricated in 150 mm SOI technology. A large optical scan angle of 78.1° at 3.403 kHz and 10 V actuation voltage is achieved. The sensor signal increases linearly to the deflection. A dynamic angle sensitivity of 48.4 fC/° is reached. Possible applications are consumer electronics, such as LIDAR or medical applications, such as fluorescence microscopy.
ISSN:2168-9229
DOI:10.1109/SENSORS43011.2019.8956929