Membrane-based Artificial Hair Sensors for Flow Sensing and Haptic Exploration
We present a resistive artificial hair flow sensor fabricated on a silicon membrane, where the hair can be inserted after fabrication, giving the opportunity to change the length and material of the hair. The sensor can be used for 2-dimensional flow sensing and haptic exploration.
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Published in | 2021 IEEE Sensors pp. 1 - 4 |
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Main Authors | , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
31.10.2021
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Subjects | |
Online Access | Get full text |
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Summary: | We present a resistive artificial hair flow sensor fabricated on a silicon membrane, where the hair can be inserted after fabrication, giving the opportunity to change the length and material of the hair. The sensor can be used for 2-dimensional flow sensing and haptic exploration. |
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ISSN: | 2168-9229 |
DOI: | 10.1109/SENSORS47087.2021.9639699 |