Membrane-based Artificial Hair Sensors for Flow Sensing and Haptic Exploration

We present a resistive artificial hair flow sensor fabricated on a silicon membrane, where the hair can be inserted after fabrication, giving the opportunity to change the length and material of the hair. The sensor can be used for 2-dimensional flow sensing and haptic exploration.

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Bibliographic Details
Published in2021 IEEE Sensors pp. 1 - 4
Main Authors Vargas Gleason, Minerva G., Lang, Walter
Format Conference Proceeding
LanguageEnglish
Published IEEE 31.10.2021
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Summary:We present a resistive artificial hair flow sensor fabricated on a silicon membrane, where the hair can be inserted after fabrication, giving the opportunity to change the length and material of the hair. The sensor can be used for 2-dimensional flow sensing and haptic exploration.
ISSN:2168-9229
DOI:10.1109/SENSORS47087.2021.9639699