High-Power VCSEL-Array with integrated Backside Optics

We present a 940nm-emitting VCSEL-array with integrated optics to tailor the beam to a square shaped top-hat far-field profile. The presented array is realized on a technology platform enabling a huge variety of integrated optics to allow flexible beam shaping without additional optics.

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Bibliographic Details
Published in2021 27th International Semiconductor Laser Conference (ISLC) pp. 1 - 2
Main Authors Gronenborn, Stephan, Gu, Xi, Herper, Markus, Kolb, Johanna, Wabra, Stefan, Weigl, Alexander, Koerner, Roman, Pruijmboom, Armand
Format Conference Proceeding
LanguageEnglish
Published IEEE 10.10.2021
Subjects
Integrated optics
Laser beams
Layout
Rollover
Semiconductor lasers
Shape
Thermal resistance
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Summary:We present a 940nm-emitting VCSEL-array with integrated optics to tailor the beam to a square shaped top-hat far-field profile. The presented array is realized on a technology platform enabling a huge variety of integrated optics to allow flexible beam shaping without additional optics.
ISSN:1947-6981
DOI:10.1109/ISLC51662.2021.9615909