Increasing Ranging Accuracy of Aluminum Nitride Pmuts by Circuit Coupling

This paper proposes a method to increase the accuracy of distance measurement for piezoelectric micromachined ultrasonic transducers (PMUTs) through introducing stable circuit coupling. The proposed method can characterize the distance through adjustable wavelength. When the ultrasonic flight distan...

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Bibliographic Details
Published in2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 740 - 743
Main Authors Cai, Junxiang, Liu, Kangfu, Lou, Liang, Zhang, Songsong, Gu, Yuandong Alex, Wu, Tao
Format Conference Proceeding
LanguageEnglish
Published IEEE 25.01.2021
Subjects
Acoustics
Aluminum nitride
circuit coupling
Couplings
Distance measurement
III-V semiconductor materials
PMUT
rangefinder
Transmitters
Wavelength measurement
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Summary:This paper proposes a method to increase the accuracy of distance measurement for piezoelectric micromachined ultrasonic transducers (PMUTs) through introducing stable circuit coupling. The proposed method can characterize the distance through adjustable wavelength. When the ultrasonic flight distance is an odd multiple of the half wavelength, the coupling signal and the piezoelectric response signal are superimposed to produce a sharp ditch. Consequently, such ultrasonic distance measuring technique could be used for the high precision applications.
ISSN:2160-1968
DOI:10.1109/MEMS51782.2021.9375241