Monolithic PMUT-on-CMOS Ultrasound System for Single Pixel Acoustic Imaging

This paper presents a fully operational integrated ultrasound transceiver based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 µm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The single PMUT-on-CMOS transducer...

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Bibliographic Details
Published in2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) pp. 394 - 397
Main Authors Ledesma, Eyglis, Zamora, Ivan, Uranga, Arantxa, Barniol, Nuria
Format Conference Proceeding
LanguageEnglish
Published IEEE 25.01.2021
Subjects
Acoustic imaging
AlN
CMOS-MEMS
Liquids
PMUT
PMUT-on-CMOS
Signal to noise ratio
time-of-flight
Transceivers
Ultrasonic imaging
Ultrasonic transducers
Ultrasonic variables measurement
ultrasound transducer
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Summary:This paper presents a fully operational integrated ultrasound transceiver based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 µm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The single PMUT-on-CMOS transducer produces ultrasound waves in liquid environment with competitive values, as actuator: 71 Pa*mm*V −1 as well as provides a high reception sensitivity (20 V/MPa). These two characteristics allow for an efficient single-pixel pulse-echo system. From time-of-flight experiments with this single PMUT-on-CMOS transceiver, a SNR dependence of 25 dB/z (z, axial distance) is achieved, allowing efficient pulse-echo imaging at 2 mm axial distances. These measurements demonstrate the capabilities of the single PMUT-on-CMOS transceivers for pixel sized acoustic imaging system. In this paper a full characterization of the single PMUT-on-CMOS transceiver is provided.
ISSN:2160-1968
DOI:10.1109/MEMS51782.2021.9375231