Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/- 15 degrees corresponding to 30-degree optical scan angle is ach...

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Bibliographic Details
Published in2019 IEEE International Ultrasonics Symposium (IUS) pp. 1977 - 1980
Main Authors Pensala, Tuomas, Kiihamaki, Jyrki, Kyynarainen, Jukka, Dekker, James, Gorelick, Sergey, Pekko, Panu, Pernu, Tapio, Ylivaara, Oili, Gao, Feng, Morits, Dmitry
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2019
Subjects
Actuators
AlN
automotive
Laser beams
Laser radar
LIDAR
MEMS
Micromechanical devices
mirror
Mirrors
Optical reflection
SOI
Springs
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Summary:Aluminum nitride piezo MEMS mirror for laser beam scanning in automotive LIDAR applications was developed. The mirror has an optical aperture of 4 mm, chip size of 6.75×6.75×2mm 3 , and scanning frequency of 1.6 kHz. A tilt angle of +/- 15 degrees corresponding to 30-degree optical scan angle is achieved with a low drive voltage of ~ 2 V pp .
ISSN:1948-5727
DOI:10.1109/ULTSYM.2019.8925660