A Double-Deck Structured MEMS Electrostatic Vibrational Energy Harvester for Minimal Footprint

This paper presents electrostatic vibrational energy harvesters which use double-deck structures for minimal footprint. The double-deck structure allocates the suspensions and the comb-electrodes in different layers of an SOI wafer. For electrical interconnection between the both layers, a stiction...

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Bibliographic Details
Published in2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) pp. 1017 - 1020
Main Authors Honma, Hiroaki, Toshiyoshi, Hiroshi
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2019
Subjects
Acceleration
Bars
Electrodes
Electrostatics
Micromechanical devices
Power generation
Vibrations
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Summary:This paper presents electrostatic vibrational energy harvesters which use double-deck structures for minimal footprint. The double-deck structure allocates the suspensions and the comb-electrodes in different layers of an SOI wafer. For electrical interconnection between the both layers, a stiction bar is used to bring the SOI structure to the same potential as the substrate. With an input acceleration of 0.18 G at 521 Hz, output power of 13.2 μW is obtained from the double-deck type, where the chip size of the equivalent device performance is reduced to 62% of the previous models.
ISSN:2160-1968
DOI:10.1109/MEMSYS.2019.8870642