Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators

A series mounted MEMS tunable capacitor in a CPW line is reported. An electro-thermal actuator has been used for driving the top plate of the parallel plate capacitor. The MEMS structure is bonded on an alumina substrate using flip-chip technology so that the silicon on the backside of the MEMS can...

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Published in1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282) Vol. 4; pp. 1507 - 1510 vol.4
Main Authors Zhiping Feng, Wenge Zhang, Bingzhi Su, Harsh, K.F., Gupta, K.C., Bright, V., Lee, Y.C.
Format Conference Proceeding Journal Article
LanguageEnglish
Published IEEE 1999
Subjects
Actuators
Bonding
Capacitors
Coplanar waveguides
Micromechanical devices
Q factor
Radio frequency
Radiofrequency microelectromechanical systems
Scattering parameters
Silicon
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Summary:A series mounted MEMS tunable capacitor in a CPW line is reported. An electro-thermal actuator has been used for driving the top plate of the parallel plate capacitor. The MEMS structure is bonded on an alumina substrate using flip-chip technology so that the silicon on the backside of the MEMS can be removed to reduce the RF losses. The lumped-element model of the capacitor up to 40 GHz has been developed based on Y-parameters, which are derived from measured S-parameters. The measured Q-factor is 256 at 1 GHz for a 0.102 pF capacitor and C/sub max//C/sub min/ ratio of the capacitor is about 2:1.
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ISBN:0780351355
9780780351356
ISSN:0149-645X
DOI:10.1109/MWSYM.1999.780240