Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics

Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the...

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Bibliographic Details
Published in2020 IEEE International Ultrasonics Symposium (IUS) pp. 1 - 4
Main Authors Rogall, Olga, Feil, Niclas M., Ding, Anli, Mayer, Elena, Pupyrev, Pavel D., Lomonosov, Alexey M., Zukauskaite, Agne, Ambacher, Oliver, Mayer, Andreas P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 07.09.2020
Subjects
aluminum scandium nitride
laser ultrasound
Measurement by laser beam
Scandium
Silicon
Surface acoustic waves
Surface emitting lasers
Ultrasonic imaging
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Summary:Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.
ISSN:1948-5727
DOI:10.1109/IUS46767.2020.9251632