A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement

This article reports a MEMS type Damping Viscous Vacuum Gauge(DVVG) for high vacuum measurement. This gauge, based on squeeze film damping effect that gases exerts on moving block with high velocity and constructed by MEMS technology, was reported for the first time. The working principle, manufactu...

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Bibliographic Details
Published in2020 IEEE Sensors pp. 1 - 4
Main Authors wang, Chengxiang, Wu, Yulie, Hou, Zhanqiang, Kuang, Yunbin, Zhang, Yongmeng, Wu, Xuezhong, Xiao, Dingbang
Format Conference Proceeding
LanguageEnglish
Published IEEE 25.10.2020
Subjects
air damping
amplitude decay
Damping
DVVG
Frequency measurement
Gyroscopes
high vacuum measurement
Loss measurement
MEMS
Micromechanical devices
Sensors
Time measurement
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Summary:This article reports a MEMS type Damping Viscous Vacuum Gauge(DVVG) for high vacuum measurement. This gauge, based on squeeze film damping effect that gases exerts on moving block with high velocity and constructed by MEMS technology, was reported for the first time. The working principle, manufacturing process and measurement steps were introduced in detail. This gauge, comparing with the existing DVVG has the advantages of smart size and lower price that could meet the requirement of embedded measurement requirement, for example, leakage rate detection of tiny vacuum chamber. The third-order mode was applied to measure vacuum degree, test result shows that measurement range covers 7.5×10- 5 Pa to 5×10 −3 Pa with especially high sensitivity (superior than 10- 5 Pa) and output linearity(R 2 =0.9978 ) between 1×10 −4 Pa and 1×10 −3 Pa.
ISSN:2168-9229
DOI:10.1109/SENSORS47125.2020.9278897