APA (7th ed.) Citation

Yao, J., Qian, J., Qiu, X., & Xing, Y. (2021, April 8). Orientation Dependent Structural Facet Recognition Method in Anisotropic Wet Etching on R-plane Single Crystal Sapphire. 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-3. https://doi.org/10.1109/EDTM50988.2021.9421058

Chicago Style (17th ed.) Citation

Yao, Jiabao, Jin Qian, Xiaoli Qiu, and Yan Xing. "Orientation Dependent Structural Facet Recognition Method in Anisotropic Wet Etching on R-plane Single Crystal Sapphire." 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) 8 Apr. 2021: 1-3. https://doi.org/10.1109/EDTM50988.2021.9421058.

MLA (9th ed.) Citation

Yao, Jiabao, et al. "Orientation Dependent Structural Facet Recognition Method in Anisotropic Wet Etching on R-plane Single Crystal Sapphire." 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 8 Apr. 2021, pp. 1-3, https://doi.org/10.1109/EDTM50988.2021.9421058.