Multiscale Modeling Study of Native Oxide Growth on a Si(100) Surface

Silicon and its native oxide SiO 2 are the most commonly used materials in semiconductor device technology. After decades of research in this field, details of the initial oxidation and the subsequent O migration and amorphization are still a subject of interest. In this paper, we present a multisca...

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Published inESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC) pp. 235 - 238
Main Authors Cvitkovich, L., Jech, M., Waldhor, D., El-Sayed, A.-M., Wilhelmer, C., Grasser, T.
Format Conference Proceeding
LanguageEnglish
Published IEEE 13.09.2021
Subjects
Adsorption
Atomic layer deposition
Discrete Fourier transforms
Oxidation
Semiconductor devices
Silicon
Silicon compounds
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Summary:Silicon and its native oxide SiO 2 are the most commonly used materials in semiconductor device technology. After decades of research in this field, details of the initial oxidation and the subsequent O migration and amorphization are still a subject of interest. In this paper, we present a multiscale modeling approach to investigate the oxidation process of a Si(100) surface. Starting from the adsorption and dissociation of single O 2 molecules, we further extended our investigations towards the initial oxidation of the first Si layer and subsequent O migration. Finally, we construct a realistic model of a Si/SiO 2 interface consisting of around 5000 atoms. The employed simulation techniques used in this study range from density functional theory (DFT) to density functional based tight binding (DFTB) to classical molecular dynamics (MD).
DOI:10.1109/ESSDERC53440.2021.9631790