Ultra-precision stage control based on friction model of non-resonant ultrasonic motor

• Published in: The 8th IEEE International Workshop on Advanced Motion Control, 2004. AMC '04 pp. 559 - 564
• Main Authors: Hashimoto, S., Ohishi, K., Ohishi, T., Ishikawa, T., Kosaka, K., Egashira, Y., Kubota, H., Ohmi, T.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Applied sciences; Computer science; control theory; systems; Control design; Control system synthesis; Control systems; Control theory. Systems; Electromagnetic forces; Electron beams; Exact sciences and technology; Friction; Hysteresis motors; Magnetic noise; Mechanical engineering. Machine design; Modelling and identification; Precision engineering, watch making; Rough surfaces; Surface roughness; Ultrasonic variables measurement; Static characteristic; Method of characteristics; Positioning; Control synthesis; Tracking task; Modeling; Micromotor; Piezoelectric device; Static conditions; Friction; Continuous control; Ultrasonic motors; Model reference adaptive control systems; System identification; Electric motor; Motion control; Execution time
• ISBN: 0780383001; 9780780383005
• DOI: 10.1109/AMC.2004.1297929

This paper presents a friction model-based ultra-precision stage control that introduces the non-resonant ultrasonic motor (NRUSM). At first, the friction characteristic is experimentally evaluated as a function of the stage position. Next, the friction model is adopted for the proposed continuous-pass tracking control design, and then the efficiency of the model-based control is verified by positioning experiments. Finally, measuring the time variation of the static friction characteristics, the on-line identification method for the control system is proposed.