Spectral investigations of low-temperature plasma induced in CO2 gas by nanosecond pulses of extreme ultraviolet (EUV)

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Bibliographic Details
Published inPlasma sources science & technology Vol. 30; no. 11
Main Authors Bartnik, A, Skrzeczanowski, W, Wachulak, P, Fok, T, Węgrzyński, Ł, Szczurek, M, Fiedorowicz, H
Format Journal Article
LanguageEnglish
Published IOP Publishing 05.11.2021
Subjects
extreme ultraviolet
extreme ultraviolet induced plasma
extreme ultraviolet photoionization
low temperature plasma
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Bibliography:PSST-104501.R1
ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/ac2e9a