Frequency dependence of the effective series capacitance of metal–Ta2O5/SiO2–Si structures
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Published in | Semiconductor science and technology Vol. 22; no. 5; pp. 533 - 536 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.05.2007
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0268-1242 1361-6641 |
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DOI: | 10.1088/0268-1242/22/5/013 |