Broadband complex permittivity measurements of dielectric substrates using a split-cylinder resonator

• Published in: 2004 IEEE MTT-S International Microwave Symposium Vol. 3; pp. 1817 - 1820 Vol.3
• Main Authors: Janezic, M.D., Kuester, E.F., Jarvis, J.B.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Acoustic wave devices, piezoelectric and piezoresistive devices; Applied sciences; Circuit properties; Dielectric loss measurement; Dielectric losses; Dielectric measurements; Dielectric substrates; Electric, optical and optoelectronic circuits; Electronic circuits; Electronics; Exact sciences and technology; Frequency measurement; Loss measurement; Magnetic field measurement; Magnetic resonance; Oscillators, resonators, synthetizers; Permittivity measurement; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Tellurium; Testing, measurement, noise and reliability; Dielectric loss; Permittivity measurement; Dielectric resonator; Dielectric measurement; Dielectric substrate; Electric field; Theoretical model; Wide band; Cylindrical cavity; Circular cylinder; Magnetic field; Complex permittivity; Permittivity; Non destructive test
• ISBN: 0780383311; 9780780383319
• ISSN: 0149-645X
• DOI: 10.1109/MWSYM.2004.1338956

We discuss a theoretical model describing the split-cylinder resonator for non-destructive measurement of a dielectric substrate's relative permittivity and loss tangent. This improved model properly accounts for the fringing electric and magnetic fields in the dielectric substrate. Previously, the split-cylinder resonator has been used for single-frequency permittivity and loss tangent measurements using only the fundamental TE/sub 011/ resonant mode. By including high-order TE/sub 0np/ modes, we demonstrate how to measure the relative permittivity and loss tangent of dielectric substrates over an extended frequency range. We validated the new model by measuring the permittivity and loss tangent of fused-silica substrates from 10 to 50 GHz and comparing with results obtained with circular-cylindrical cavity, a dielectric-post resonator, and several split-post resonators.