Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers
In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds...
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Published in | LEOS 2006 - 19th Annual Meeting of the IEEE Lasers and Electro-Optics Society pp. 895 - 896 |
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Main Authors | , , , , , , , , , , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.10.2006
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm |
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ISBN: | 9780780395565 0780395565 |
ISSN: | 1092-8081 2766-1733 |
DOI: | 10.1109/LEOS.2006.279114 |