Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers

In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds...

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Bibliographic Details
Published inLEOS 2006 - 19th Annual Meeting of the IEEE Lasers and Electro-Optics Society pp. 895 - 896
Main Authors Menoni, C.S., Vaschenko, G., Brizuela, F., Brewer, C., Wang, Y., Larotonda, M.A., Luther, B.M., Marconi, M.C., Rocca, J.J., Chao, W., Liddle, J.A., Liu, Y., Anderson, E.H., Attwood, D.T., Vinogradov, A.V., Artioukov, I.A., Pershyn, Y.P., Kondratenko, V.V.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2006
Subjects
Biomedical optical imaging
Chaos
Image resolution
Laser modes
Nanobioscience
Optical imaging
Optical microscopy
Optical saturation
Spatial resolution
Ultraviolet sources
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Summary:In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm
ISBN:9780780395565
0780395565
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2006.279114