Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range

We report on the design and prototype realization of the gauge probe sensor for the measurement of displacement based on a laser interferometer. The measurement system incorporates a suitable laser source and interferometric phase processing system. The phase extraction (fringe counting) relies on a...

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Bibliographic Details
Published in2016 IEEE SENSORS pp. 1 - 3
Main Authors Rerucha, Simon, Hola, Miroslava, Sarbort, Martin, Oulehla, Jindrich, Mikel, Bretislav, Lazar, Josef, Cip, Ondrej
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2016
Subjects
Adaptive optics
Measurement by laser beam
Optical interferometry
Optical modulation
Optical sensors
Optical variables measurement
Probes
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Summary:We report on the design and prototype realization of the gauge probe sensor for the measurement of displacement based on a laser interferometer. The measurement system incorporates a suitable laser source and interferometric phase processing system. The phase extraction (fringe counting) relies on a single-detector homodyne detection method for phase extraction that uses a harmonic optical frequency modulation of the laser beam and allows for a significantly reduced and thus compact and robust optical arrangement. The experimental verification revealed that the sensor system achieves the sub-nanometer precision and nanometer accuracy in the 10 mm measurement range.
DOI:10.1109/ICSENS.2016.7808489