Analytical modeling of collisionless triple frequency capacitive sheath

A self-consistent model for collisionless capacitively coupled plasma (CCP) sheath driven by triple frequency (TF) RF source has been developed. This work established analytical expressions for sheath parameters based on the assumptions of time independent collisionless ion motion and inertialess el...

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Bibliographic Details
Published in2012 7th International Conference on Electrical and Computer Engineering pp. 717 - 720
Main Authors Rahman, M. T., Dewan, M. N. A., Chowdhury, M. R. H.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2012
Subjects
Capacitively coupled plasma
Collisionless sheath
Electric fields
Electric potential
Hafnium
Mathematical model
Plasmas
Radio frequency
RF plasma
Time-frequency analysis
time-independent ion motion
Triple frequency
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Summary:A self-consistent model for collisionless capacitively coupled plasma (CCP) sheath driven by triple frequency (TF) RF source has been developed. This work established analytical expressions for sheath parameters based on the assumptions of time independent collisionless ion motion and inertialess electrons. The parameters calculated using the present model are compared with those calculated using a single frequency model and a dual frequency model for time independent collisionless case. The effects of frequency ratio on sheath potential and sheath width are also investigated.
ISBN:146731434X
9781467314343
DOI:10.1109/ICECE.2012.6471651