Micro-photoreflectance spectroscopy investigation of InGaAlAs/GaAsSb/InP heterojunction bipolar transistors
We characterize InGaAlAs/GaAsSb/InP heterojunction bipolar transistor structures using microphotoreflectance spectroscopy (micro-PR). The experiments show the feasibility of micro-PR measurement on a 1/spl mu/m diameter spot opening the way to device optical characterization under operation.
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Published in | International Conference on Indium Phosphide and Related Materials, 2005 pp. 200 - 203 |
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Main Authors | , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
2005
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Subjects | |
Online Access | Get full text |
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Summary: | We characterize InGaAlAs/GaAsSb/InP heterojunction bipolar transistor structures using microphotoreflectance spectroscopy (micro-PR). The experiments show the feasibility of micro-PR measurement on a 1/spl mu/m diameter spot opening the way to device optical characterization under operation. |
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ISBN: | 9780780388918 0780388917 |
ISSN: | 1092-8669 |
DOI: | 10.1109/ICIPRM.2005.1517456 |