Allan variance analysis on MEMS tilt sensors with different principles of operation

Tilt sensing is an important part in absolute position and orientation measurement, e.g. inertial navigation units and tilt detectors. In this paper, the direct comparison of three MEMS tilt sensors with different principle of operation has been carried out and evaluated using Allan variance (AV) me...

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Bibliographic Details
Published in2011 IEEE SENSORS Proceedings pp. 1570 - 1573
Main Authors Havranek, Z., Klusacek, S., Benes, P., Vagner, M.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2011
Subjects
Acceleration
Accelerometers
Micromechanical devices
Noise
Temperature measurement
Temperature sensors
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Summary:Tilt sensing is an important part in absolute position and orientation measurement, e.g. inertial navigation units and tilt detectors. In this paper, the direct comparison of three MEMS tilt sensors with different principle of operation has been carried out and evaluated using Allan variance (AV) method. Selected samples represent major principles used in MEMS accelerometers on the market - capacitive Analog Devices ADXL203, thermal MEMSIC MXA6500M and piezoresistive Panasonic AGS61231. All devices have similar measurement range and acceleration sensitivity. The results of AV analysis show similar behavior and curve shape in capacitive principle, with the lowest acceleration random walk observed, and in thermal principle, with six times higher bias instability in compare with capacitive principle. The piezoresistive principle has lower velocity random walk, but it is very sensitive to temperature variations, seen in long cluster times.
ISBN:9781424492909
1424492904
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2011.6127219