Modelling Propagation Loss of PECVD Silicon Nitride Strip Waveguides: Evaluation and Assessment of Width Dependency

Measurements of the width-dependent propagation loss of 250 nm thick silicon nitride strip waveguides at 850 nm wavelength indicate good agreement with the theoretical model. The waveguides were fabricated by plasma-enhanced chemical vapor deposition (PECVD).

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Bibliographic Details
Published in2021 Conference on Lasers and Electro-Optics (CLEO) pp. 1 - 2
Main Authors Buchberger, Anton, Pulko, Jozef, Morecroft, Deborah, Basso, Omar, Kraft, Jochen, Bergmann, Alexander
Format Conference Proceeding
LanguageEnglish
Published OSA 01.05.2021
Subjects
Lasers and electrooptics
Propagation losses
Silicon nitride
Strips
Waveguide lasers
Waveguide theory
Wavelength measurement
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Summary:Measurements of the width-dependent propagation loss of 250 nm thick silicon nitride strip waveguides at 850 nm wavelength indicate good agreement with the theoretical model. The waveguides were fabricated by plasma-enhanced chemical vapor deposition (PECVD).