Perspective of nano technology in semiconductor industry
Saved in:
Published in | 2006 IEEE Nanotechnology Materials and Devices Conference Vol. 1; p. 66 |
---|---|
Main Author | |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.10.2006
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISBN: | 9781424405404 1424405408 |
---|---|
DOI: | 10.1109/NMDC.2006.4388698 |