Micro/Nano Pattern Fabrication Using Ultrafast Laser Surface Modification and Self-Assembled Monolayers

• Published in: 19th IEEE International Conference on Micro Electro Mechanical Systems pp. 322 - 325
• Main Authors: Chang, W.S., Huh, K.S., Cho, S.H., Kim, J.G., Whang, K.H.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 2006
• Subjects: Application specific integrated circuits; Detectors; Gold; Insulation; Integrated circuit packaging; Nanoparticles; Optical device fabrication; Self-assembly; Surface emitting lasers; Transducers
• ISBN: 0780394755; 9780780394759
• ISSN: 1084-6999
• DOI: 10.1109/MEMSYS.2006.1627801

Self-assembled monolayers (SAMs) have important potential industrial applications, such as in sensors, transducers, detectors, packaging, and insulating layers for integrated circuits. In this study, electrostatic interaction is utilized to direct the patterning of a gold substrate on thiolate group (-SH) functionalized surfaces. We achieved direct laser writing of photopatterns with a feature width of several hundred nanometers on gold surfaces. SAMs of alkanethiols were formed on a gold substrate and modified by a femtosecond laser to create patterns of hydrophobic alkyl and hydrophilic thiol, carboxyl, and carbonyl groups. Employing a novel approach to nanofabrication by utilizing a femtosecond laser, gold nanoparticles were fabricated onto gold surfaces to create two-dimensional (2D) nanoparticle arrays.