A CMOS interdigital capacitive humidity sensor enhanced by a multi-layered structure

This paper reports a novel interdigital capacitive humidity sensor enhanced by a multi-layered structure. Compared with a typical interdigital capacitive humidity sensor, both the sensitive capacitance and the sensitivity were enhanced by the improved structure. According to the test results the sen...

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Bibliographic Details
Published inIEEE SENSORS 2014 Proceedings pp. 1459 - 1462
Main Authors Jian-Qiu Huang, Wen-Hao Chen, Dong-Ping Zhu, Lei Han
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.11.2014
Subjects
Capacitance
Electrodes
Humidity
Hysteresis
Resistance
Sensitivity
Time factors
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Summary:This paper reports a novel interdigital capacitive humidity sensor enhanced by a multi-layered structure. Compared with a typical interdigital capacitive humidity sensor, both the sensitive capacitance and the sensitivity were enhanced by the improved structure. According to the test results the sensitivity and hysteresis of the humidity sensor is 10F/%RH and 3%RH respectively. The response time of the humidity senor is 15s.
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2014.6985289