Process queue time control, reactive or proactive?

Process queue time control is a trade-off between defect and tool utilization. Three cases of queue time sensitivity discovered in active silicon (RX) module in our fab are discussed in this paper which led us to take a more pro-active approach to impose queue time control.

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Bibliographic Details
Published in2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) pp. 163 - 165
Main Authors Yu, Chienfan, Bauman, Laura, Jophlin-Gut, Vickie, Oakley, Garrett, Carbonnell, Michael, Sowinski, Zoey, Sherwood, Edward, Hawkins, Katherine, Kelly, Ryan, Sheraw, Rebekah
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.04.2018
Subjects
Humidity
Moisture
Process control
Process queue time
Sensitivity
Silicon
silicon erosion
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Summary:Process queue time control is a trade-off between defect and tool utilization. Three cases of queue time sensitivity discovered in active silicon (RX) module in our fab are discussed in this paper which led us to take a more pro-active approach to impose queue time control.
ISSN:2376-6697
DOI:10.1109/ASMC.2018.8373185