Properties of AlScN thin films for hybrid BAW/SAW resonator fabrication

New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.

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Bibliographic Details
Published in2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) pp. 565 - 566
Main Authors Pashchenko, V., Mertin, S., Parsapour, F., Li, J., Muralt, P., Ballandras, S.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.07.2017
Subjects
Acoustic measurements
aluminium scandium nitride
Aluminum nitride
bulk acoustic wave
Electrodes
electromechanical coupling
III-V semiconductor materials
piezoelectric properties
Substrates
surface acoustic wave
Surface acoustic waves
thin-film resonators
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Summary:New hybrid bulk-surface acoustic wave resonators using scandium doped aluminium nitride thin films were simulated, using material constants from piezoelectric measurement techniques for thin films. Afterwards they were fabricated and an electromechanical coupling of 4.3% was achieved.
ISSN:2327-1949
DOI:10.1109/FCS.2017.8088958