Laser ablated millimeter wave metamaterial antenna

This paper presents the design, fabrication and characterization of a zeroth order resonance Composite Right / Left-Handed (CRLH) coplanar waveguide (CPW) antenna on high resistivity silicon substrate, working at 38 GHz. The technological process consisted of a combination of classic photolithograph...

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Bibliographic Details
Published inCAS 2011 Proceedings (2011 International Semiconductor Conference) Vol. 1; pp. 185 - 188
Main Authors Bunea, A., Craciunoiu, F., Zamfirescu, M., Dabu, R., Sajin, G.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2011
Subjects
Antenna measurements
Metamaterials
Microwave antennas
Microwave circuits
Microwave filters
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Summary:This paper presents the design, fabrication and characterization of a zeroth order resonance Composite Right / Left-Handed (CRLH) coplanar waveguide (CPW) antenna on high resistivity silicon substrate, working at 38 GHz. The technological process consisted of a combination of classic photolithography and laser ablation. Laser microprocessing was chosen for the processing of 7 μm wide gaps in the Au/Cr metal layer. Experimental results show RL <; -38 dB / 38.82 GHz, the -3 dB beamwidth of the radiation lobe of approx. 17° (in the transversal plane) and a computed maximum gain of 1.75 dBi / 38.82 GHz.
ISBN:9781612841731
1612841732
ISSN:1545-827X
2377-0678
DOI:10.1109/SMICND.2011.6095753