Vibrating RF MEMS for Timing and Frequency References

This paper presents recent progresses on making vibrating RF MEMS oscillators for timing and frequency reference applications. Starting from the performance requirements of an oscillator in various systems, the key aspects of MEMS oscillators, including resonator design, oscillator performances, tem...

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Bibliographic Details
Published in2006 IEEE MTT-S International Microwave Symposium Digest pp. 672 - 675
Main Author Wan-Thai Hsu
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2006
Subjects
Acoustic beams
Frequency
Laser excitation
Micromechanical devices
micromechanical resonators
Oscillators
Packaging
Q factor
Radiofrequency microelectromechanical systems
RF MEMS
Temperature
Timing
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Summary:This paper presents recent progresses on making vibrating RF MEMS oscillators for timing and frequency reference applications. Starting from the performance requirements of an oscillator in various systems, the key aspects of MEMS oscillators, including resonator design, oscillator performances, temperature compensation, packaging and integrations, are reviewed. Future directions of the research are also suggested at the end of the paper
ISBN:9780780395411
0780395417
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2006.249704