An inertial smart-sensor based on silicon nanowires for wireless sportive activity monitoring

This paper presents the design of a CMOS integrated circuit dedicated to the hybrid integration of a three-axis inertial smart-sensor with digital interface. Inertial sensing is achieved with an innovative low-cost technology that implements piezoresistive detection in MEMS devices with single-cryst...

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Bibliographic Details
Published in2011 IEEE SENSORS Proceedings pp. 1429 - 1432
Main Authors Leman, O., Boujamaa, E. M., Rahajandraibe, W., Kussener, E., Meillere, S., Barthelemy, H., Jourdan, G., Rey, P.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2011
Subjects
CMOS integrated circuits
Finite impulse response filter
Low pass filters
Nanowires
Noise
Wireless communication
Wireless sensor networks
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Summary:This paper presents the design of a CMOS integrated circuit dedicated to the hybrid integration of a three-axis inertial smart-sensor with digital interface. Inertial sensing is achieved with an innovative low-cost technology that implements piezoresistive detection in MEMS devices with single-crystal silicon nanowires. The circuit includes a custom-designed analog front-end that achieves the bias and readout of the sensor, and an analog-to-digital converter with oversampling and integrated digital decimation. The obtained smart-sensor features a reduced output data rate that is suitable for a wireless sensor network with direct transmission of the raw data to a remote base station.
ISBN:9781424492909
1424492904
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2011.6127112