Investigation of Nanometer XY Positioning Stage

An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are a...

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Bibliographic Details
Published in2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems pp. 320 - 324
Main Authors Weili Wang, Yetai Fei, Kuangchao Fan
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.01.2006
Subjects
Actuators
Ceramics
coplanar concept
Design engineering
distortion
Distortion measurement
finite element analysis
Finite element methods
Friction
repeatability
Steel
straightness
Systems engineering and theory
Thermal expansion
Thermal force
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Summary:An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are all considered to achieve low structure distortion and thermal shift with impacted force and temperature change. Finite element analysis modeling techniques were used to optimize the configuration and parameters of the stage. Integrated with ultrasonic actuator and the linear diffraction grating interferometer, the straightness of the guide way and the measuring repeatability of the stage have been proved. Experimental results have shown that the stage has a higher straightness less than 5" and the repeatability less than 30 nm in fine motion
ISBN:1424401399
9781424401390
DOI:10.1109/NEMS.2006.334732