Thickness control by ion beam milling in acoustic resonator devices

In this paper, practical aspects of production worthy methods for film uniformity adjustment (trimming) used in manufacturing of Film Bulk Acoustic Resonator (FBAR) filters have been presented. Two-step trimming in conjunction with thickness "smoothing" technique control total thickness ra...

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Bibliographic Details
Published in2010 IEEE International Frequency Control Symposium pp. 642 - 645
Main Authors Mishin, Sergey, Oshmyansky, Yury, Bi, Frank
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.06.2010
Subjects
Aluminum
Film bulk acoustic resonators
Ion beams
Ion sources
Surface treatment
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Summary:In this paper, practical aspects of production worthy methods for film uniformity adjustment (trimming) used in manufacturing of Film Bulk Acoustic Resonator (FBAR) filters have been presented. Two-step trimming in conjunction with thickness "smoothing" technique control total thickness range to within less than 8 A on product wafers with variable surface film etch rates even with difficult to measure film thickness. Trimming processes were used to allow using one wafer from a batch to provide compensation feedback in the FBAR devices. Combining ion mill with deposition in the same tool produces <;0.1% uniformity in the deposited films.
ISBN:1424463998
9781424463992
ISSN:2327-1914
DOI:10.1109/FREQ.2010.5556249