Sensitivity enhancement by surface texturing of Ag-doped BaTiO3-CuO thin film for CO2 gas sensor

Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO 3 -CuO on Ag-doped BaTiO 3 -CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO 2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering...

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Bibliographic Details
Published in2014 Conference on Optoelectronic and Microelectronic Materials & Devices pp. 30 - 32
Main Authors Rudraswamy, S. B., Bhat, Navakanta
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.12.2014
Subjects
BaTiO 3 CuO
Carbon dioxide
Gas detectors
Gas sensor
Nanostructures
Sensitivity
Surface texture
Zinc oxide
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Summary:Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO 3 -CuO on Ag-doped BaTiO 3 -CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO 2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped BaTiO 3 -CuO mixed oxide are fabricated on top of the film using lithography process. Sensing characteristics for different CO 2 concentration are obtained for different operating temperatures. Surface textured sensor device shows enhanced sensitivity over thin film sensor.
ISBN:9781479968671
1479968676
ISSN:1097-2137
2377-5505
DOI:10.1109/COMMAD.2014.7038644