Sensitivity enhancement by surface texturing of Ag-doped BaTiO3-CuO thin film for CO2 gas sensor
Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO 3 -CuO on Ag-doped BaTiO 3 -CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO 2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering...
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Published in | 2014 Conference on Optoelectronic and Microelectronic Materials & Devices pp. 30 - 32 |
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Main Authors | , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.12.2014
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Subjects | |
Online Access | Get full text |
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Summary: | Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO 3 -CuO on Ag-doped BaTiO 3 -CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO 2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped BaTiO 3 -CuO mixed oxide are fabricated on top of the film using lithography process. Sensing characteristics for different CO 2 concentration are obtained for different operating temperatures. Surface textured sensor device shows enhanced sensitivity over thin film sensor. |
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ISBN: | 9781479968671 1479968676 |
ISSN: | 1097-2137 2377-5505 |
DOI: | 10.1109/COMMAD.2014.7038644 |